Sens Actuators A Phys
· 2014 Nov · PMID 25309041
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Two piezoelectric transducer modes applied in microelectromechanical systems are (i) the 3-1 mode with parallel electrodes perpendicular to a vertical polarization vector, and (ii) the 3-3 mode which uses interdigitated...Two piezoelectric transducer modes applied in microelectromechanical systems are (i) the 3-1 mode with parallel electrodes perpendicular to a vertical polarization vector, and (ii) the 3-3 mode which uses interdigitated (IDT) electrodes to realize an in-plane polarization vector. This study compares the two configurations by deriving a Norton equivalent representation of each approach - including expressions for output charge and device capacitance. The model is verified using a microfabricated device comprised of multiple epitaxial silicon beams with sol-gel deposited lead zirconate titanate at the surface. The beams have identical dimensions and are attached to a common moving element at their tip. The only difference between beams is electrode configuration - enabling a direct comparison. Capacitance and charge measurements verify the presented theory with high accuracy. The Norton equivalent representation is general and enables comparison of any figure of merit, including electromechanical coupling coefficient and signal to noise ratio. With respect to coupling coefficient, the experimentally validated theory in this work suggests that 3-3 mode IDT-electrode configurations offer the potential for modest improvements compared against 3-1 mode devices (less than 2×), and the only geometrical parameter affecting this ratio is the fill factor of the IDT electrode.
Sens Actuators A Phys
· 2014 Sep · PMID 25045203
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This paper presents an acousto-optic (AO) sensor based on resonance grating waveguide structure. The sensor is fabricated using elastic polymer materials to achieve a good sensitivity to ultrasound pressure waves. Ultras...This paper presents an acousto-optic (AO) sensor based on resonance grating waveguide structure. The sensor is fabricated using elastic polymer materials to achieve a good sensitivity to ultrasound pressure waves. Ultrasound pressure waves modify the structural parameters of the sensor and result in the optical resonance shift of the sensor. This converts into a light intensity modulation. A commercial ultrasound transducer at 20 MHz is used to characterize a fabricated sensor and detection sensitivity at different optical source wavelength within a resonance spectrum is investigated. Practical use of the sensor at a fixed optical source wavelength is presented. Ultimately, the geometry of the planar sensor structure is suitable for two-dimensional, optical pressure imaging applications such as pressure wave detection and mapping, and ultrasound imaging.
Liu L, Wang E, Zhang X
… +3 more, Liang W, Li X, Xie H
Sens Actuators A Phys
· 2014 Aug · PMID 25013304
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A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS s...A fiber-optic 3D confocal scanning microendoscope employing MEMS scanners for both lateral and axial scan was designed and constructed. The MEMS 3D scan engine achieved a lateral scan range of over ± 26° with a 2D MEMS scanning micromirror and a depth scan of over 400 μm with a 1D MEMS tunable microlens. The lateral resolution and axial resolution of this system were experimentally measured as 1.0 μm and 7.0 μm, respectively. 2D and 3D confocal reflectance images of micro-patterns, micro-particles, onion skins and acute rat brain tissue were obtained by this MEMS-based 3D confocal scanning microendoscope.
Hickerson AI, Lu HW, Roskos K
… +2 more, Carey T, Niemz A
Sens Actuators A Phys
· 2013 Dec · PMID 24825946
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We present a passive, miniature check valve which can be manufactured using standard techniques ideal for low-cost, disposable systems used in medical devices and other applications. The body of the valve consists of a h...We present a passive, miniature check valve which can be manufactured using standard techniques ideal for low-cost, disposable systems used in medical devices and other applications. The body of the valve consists of a hollow cylindrical core, closed at one end, with a side port and a cylindrical elastomeric sleeve placed over the core body, covering the side port. The pressure required for initial opening of the valve, referred to as cracking pressure, can be adjusted, and depends predominantly on the valve core outer diameter, the sleeve inner diameter, the sleeve wall thickness, and the sleeve material's modulus of elasticity. These parameters can be controlled to tight tolerances, while the tolerances on other features can be relaxed, which simplifies valve manufacturing and assembly. Valve embodiments produced from different materials, and with varying critical dimensions, exhibited distinct and reproducible cracking pressures in the range of 2 to 20 PSI. The cracking pressure did not vary significantly as a function of flow rate. No back flow leakage was encountered up to 30 PSI, the pressure limit of the sensor used in this experiment. Most of the valves tested had small internal volumes of 3-4 μL. The internal volume can be further reduced by selecting a core of smaller inner diameter. In contrast to lithography-based microvalves that generally must be manufactured within the fluidic device, the herein presented valve can be manufactured independently of, and can be readily integrated into fluidic systems manufactured via a wide selection of fabrication methods.
Kim J, Hilton JP, Yang KA
… +3 more, Pei R, Stojanovic M, Lin Q
Sens Actuators A Phys
· 2013 Jun · PMID 24729660
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This paper presents a microchip that isolates and enriches target-binding single-stranded DNA (ssDNA) from a randomized DNA mixture using a combination of solid-phase extraction and electrophoresis. Strands of ssDNA in a...This paper presents a microchip that isolates and enriches target-binding single-stranded DNA (ssDNA) from a randomized DNA mixture using a combination of solid-phase extraction and electrophoresis. Strands of ssDNA in a randomized mixture are captured via specific binding onto target-functionalized microbeads in a microchamber. The strands are further separated from impurities and enriched on-chip via electrophoresis. The microchip consists of two microchambers that are connected by a channel filled with agarose gel. In the isolation chamber, beads functionalized with human immunoglobulin E (IgE) are retained by a weir structure. An integrated heater elevates the temperature in the chamber to elute desired ssDNA from the beads, and electrophoretic transport of the DNA through the gel to the second chamber is accomplished by applying an electric potential difference between the two chambers. Experimental results show that ssDNA expressing binding affinity to IgE was captured and enriched from a sample of ssDNA with random sequences, demonstrating the potential of the microchip to enhance the sensitivity of ssDNA detection methods in dilute and complex biological samples.
Zhu J, Palla M, Ronca S
… +3 more, Warpner R, Ju J, Lin Q
Sens Actuators A Phys
· 2013 Jun · PMID 24729659
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Genotyping of single nucleotide polymorphisms (SNPs) allows diagnosis of human genetic disorders associated with single base mutations. Conventional SNP genotyping methods are capable of providing either accurate or high...Genotyping of single nucleotide polymorphisms (SNPs) allows diagnosis of human genetic disorders associated with single base mutations. Conventional SNP genotyping methods are capable of providing either accurate or high-throughput detection, but are still labor-, time-, and resource-intensive. Microfluidics has been applied to SNP detection to provide fast, low-cost, and automated alternatives, although these applications are still limited by either accuracy or throughput issues. To address this challenge, we present a MEMS-based SNP genotyping approach that uses solid-phase-based reactions in a single microchamber on a temperature control chip. Polymerase chain reaction (PCR), allele specific single base extension (SBE), and desalting on microbeads are performed in the microchamber, which is coupled with matrix-assisted laser desorption/ionization time-of-flight mass spectrometry (MALDI-TOF MS) to analyze the SBE product. Experimental results from genotyping of the SNP on exon 1 of the HBB gene, which causes sickle cell anemia, demonstrate the potential of the device for rapid, accurate, multiplexed and high-throughput detection of SNPs.
Bosco FG, Bache M, Yang J
… +4 more, Chen CH, Hwu ET, Lin Q, Boisen A
Sens Actuators A Phys
· 2013 Jun · PMID 24672146
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A plug-and-play CD-like platform is used to perform a statistical detection of platelet derived growth factor (PDGF) proteins through aptamer-based surface functionalization of multiple microcantilever arrays. When PDGF...A plug-and-play CD-like platform is used to perform a statistical detection of platelet derived growth factor (PDGF) proteins through aptamer-based surface functionalization of multiple microcantilever arrays. When PDGF proteins bind to aptamer coatings, the cantilevers deflect. The deflection response is monitored by optical read-out units from a commercial DVD-ROM device. We report on the use of an improved sensing platform which facilitates measurements under continuous liquid flow and with temperature control. Also, the mechanical wobbling of the DVD-ROM platform has been minimized and the scanning system has been optimized in order to detect cantilever deflections in liquid with nanometer scale resolution. The capability of the sensing platform is demonstrated by detection of clinically relevant concentrations of PDGF proteins. We present statistical measurements on 100 microcantilevers at different concentrations of PDGF, ranging from 10 nM to 400 nM. Hereby it is possible to reliably characterize the averaged mechanical response of cantilevers as a function of protein concentration.
Antlinger H, Clara S, Beigelbeck R
… +3 more, Cerimovic S, Keplinger F, Jakoby B
Sens Actuators A Phys
· 2013 Nov · PMID 25844023
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Physical fluid parameters like viscosity, mass density and sound velocity can be determined utilizing ultrasonic sensors. We introduce the concept of a recently devised transmission based sensor utilizing pressure waves...Physical fluid parameters like viscosity, mass density and sound velocity can be determined utilizing ultrasonic sensors. We introduce the concept of a recently devised transmission based sensor utilizing pressure waves to determine the longitudinal viscosity, bulk viscosity, and second coefficient of viscosity of a sample fluid in a test chamber. A model is presented which allows determining these parameters from measurement values by means of a fit. The setup is particularly suited for liquids featuring higher viscosities for which measurement data are scarcely available to date. The setup can also be used to estimate the sound velocity in a simple manner from the phase of the transfer function.
Sens Actuators A Phys
· 2013 Oct · PMID 24058267
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There are a number of applications for microstructure devices consisting of a regular pattern of perforations, and many of these utilize fluid damping. For the analysis of viscous damping and for calculating the spring f...There are a number of applications for microstructure devices consisting of a regular pattern of perforations, and many of these utilize fluid damping. For the analysis of viscous damping and for calculating the spring force in some cases, it is possible to take advantage of the regular hole pattern by assuming periodicity. Here a model is developed to determine these quantities based on the solution of the Stokes' equations for the air flow. Viscous damping is directly related to thermal-mechanical noise. As a result, the design of perforated microstructures with minimal viscous damping is of real practical importance. A method is developed to calculate the damping coefficient in microstructures with periodic perforations. The result can be used to minimize squeeze film damping. Since micromachined devices have finite dimensions, the periodic model for the perforated microstructure has to be associated with the calculation of some frame (edge) corrections. Analysis of the edge corrections has also been performed. Results from analytical formulas and numerical simulations match very well with published measured data.
Hsu HS, Benjauthrit V, Zheng F
… +4 more, Chen R, Huang Y, Zhou Q, Shung KK
Sens Actuators A Phys
· 2012 Jun · PMID 23750072
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We have successfully fabricated (0.65PMN-0.35PT)-(1 - )PZT (PMN-PT-(1 - )PZT), where is 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a compo...We have successfully fabricated (0.65PMN-0.35PT)-(1 - )PZT (PMN-PT-(1 - )PZT), where is 0.1, 0.3, 0.5, 0.7 and 0.9, thick films with a thickness of approximately 9 µm on platinized silicon substrate by employing a composite sol-gel technique. X-ray diffraction analysis and scanning electron microscopy revealed that these films are dense and creak-free with well-crystallized perovskite phase in the whole composition range. The dielectric constant can be controllably adjusted by using different compositions. Higher PZT content of PMN-PT-(1 - )PZT films show better ferroelectric properties. A representative 0.9PMN-PT-0.1PZT thick film transducer is built. It has 200 MHz center frequency with a -6 dB bandwidth of 38% (76 MHz). The measured two-way insertion loss is 65 dB.
Sens Actuators A Phys
· 2012 Oct · PMID 23641125
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Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, deflection-sensing elements along with heating elements are integrated onto micromachined cantilever arrays to...Microcantilevers are used in a number of applications including atomic-force microscopy (AFM). In this work, deflection-sensing elements along with heating elements are integrated onto micromachined cantilever arrays to increase sensitivity, and reduce complexity and cost. An array of probes with 5-10 nm gold ultrathin film sensors on silicon substrates for high throughput scanning probe microscopy is developed. The deflection sensitivity is 0.2 ppm/nm. Plots of the change in resistance of the sensing element with displacement are used to calibrate the probes and determine probe contact with the substrate. Topographical scans demonstrate high throughput and nanometer resolution. The heating elements are calibrated and the thermal coefficient of resistance (TCR) is 655 ppm/K. The melting temperature of a material is measured by locally heating the material with the heating element of the cantilever while monitoring the bending with the deflection sensing element. The melting point value measured with this method is in close agreement with the reported value in literature.
Antlinger H, Clara S, Beigelbeck R
… +3 more, Cerimovic S, Keplinger F, Jakoby B
Sens Actuators A Phys
· 2012 Oct · PMID 23565036
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Ultrasonic sensors can be used to determine physical fluid parameters like viscosity, density, and speed of sound. In this contribution, we present the concept for an integrated sensor utilizing pressure waves to sense t...Ultrasonic sensors can be used to determine physical fluid parameters like viscosity, density, and speed of sound. In this contribution, we present the concept for an integrated sensor utilizing pressure waves to sense the characteristic acoustic impedance of a fluid. We note that the basic setup generally allows to determine the longitudinal viscosity and the speed of sound if it is operated in a resonant mode as will be discussed elsewhere. In this contribution, we particularly focus on a modified setup where interferences are suppressed by introducing a wedge reflector. This enables sensing of the liquid's characteristic acoustic impedance, which can serve as parameter in condition monitoring applications. We present a device model, experimental results and their evaluation.
Bergmair B, Huber T, Bruckner F
… +2 more, Vogler C, Suess D
Sens Actuators A Phys
· 2012 Aug · PMID 23565035
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Magnetoelastic sensors are used in a wide field of wireless sensing applications. The sensing element is a low-cost magnetostrictive ribbon whose resonant frequency depends on the measured quantity. The accuracy of magne...Magnetoelastic sensors are used in a wide field of wireless sensing applications. The sensing element is a low-cost magnetostrictive ribbon whose resonant frequency depends on the measured quantity. The accuracy of magnetoelastic sensors is limited by the fact that the resonant frequency is also affected by the earth's magnetic field. In this paper we present a technique to minimize this effect by applying an antisymmetric magnetic bias field to the ribbon. The ribbon's response to external perturbation fields was measured and compared to a conventional sensor design. Our results show that the influence of the earth's magnetic field could be reduced by 77%.
Sharma A, Rieth L, Tathireddy P
… +8 more, Harrison R, Oppermann H, Klein M, Töpper M, Jung E, Normann R, Clark G, Solzbacher F
Sens Actuators A Phys
· 2012 Dec · PMID 23288983
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The encapsulation and packaging reliability in fully integrated, fully wireless 100 channel Utah Slant Electrode Array (USEA)/integrated neural interface-recording version 5 (INI-R5) has been evaluated by monitoring the...The encapsulation and packaging reliability in fully integrated, fully wireless 100 channel Utah Slant Electrode Array (USEA)/integrated neural interface-recording version 5 (INI-R5) has been evaluated by monitoring the extended long term in-vitro functional stability and recording longevity. The INI encapsulated with 6-μm Parylene-C was immersed in phosphate buffer saline (PBS) at room temperature for a period of over 12 months. The USEA/INI-R5, while being soaked was powered and configured wirelessly through 2.765 MHz inductive link and the transmitted frequency shift keying (FSK) modulated radio-frequency (RF) (900 MHz Industrial, scientific, medical-ISM band) signal was also recorded wirelessly as a function of soak time. In order to test the long term recording ability, in-vitro wireless recording was performed in agarose for few channels. The full functionality and the ability of the electrodes to record artificial neural signals even after 12 months of PBS soak provides a measure of encapsulation reliability, the functional and recording stability in fully integrated wireless neural interface and potential usefulness for future chronic implants.
Kim J, Ennis HL, Nguyen TH
… +6 more, Zhuang X, Luo J, Yao J, Kessin RH, Stojanovic M, Lin Q
Sens Actuators A Phys
· 2012 Dec · PMID 24723742
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This paper investigates the light-driven migration of the multi-cellular microorganism as a potential bio-actuation mechanism in microsystems. As a platform for slug migration we use microscale confinements, which consi...This paper investigates the light-driven migration of the multi-cellular microorganism as a potential bio-actuation mechanism in microsystems. As a platform for slug migration we use microscale confinements, which consist of intersecting microchannels fabricated from solidified agar-water solution. The agar surface provides necessary moisture to the slugs during the experiment while remaining sufficiently stiff to allow effective slug migration. The movements of the slugs in the microchannels are driven and guided by phototaxis via controlling light transmitted through optical fibers. The microchannels impose geometrical confinements on the migrating slugs, improving the spatial precision of the migration. We demonstrate that slugs that form in a microchamber can be driven to migrate through the microchannels, as well as steered to a particular direction at microchannel intersections. Our experimental results indicate that slug movements can be more effectively controlled in microchannels, and potentially useful for bio-actuation applications.
Sens Actuators A Phys
· 2012 May · PMID 22773894
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The electromechanical performance of piezoelectric scanning mirrors for endoscopy imaging is presented. The devices are supported by a single actuating cantilever to achieve a high fill factor, the ratio of mirror area t...The electromechanical performance of piezoelectric scanning mirrors for endoscopy imaging is presented. The devices are supported by a single actuating cantilever to achieve a high fill factor, the ratio of mirror area to the combined mirror and actuator area. The largest fill factor devices (74%) achieved 10° mechanical scan range at +/-10V with a 300 μm long cantilever. The largest angular displacement of 30° mechanical scan range was obtained with a 500 μm long cantilever device with a 63% fill factor driven at 40 Vpp. A systematic investigation of device performance (displacement and speed) as a function of fabrication and operational parameters including the stress balance in the cantilever revealed unexpectedly large displacements with lack of inversion at the coercive field. An interpretation of the results is presented based on piezoelectric film domain orientation and clamping with supporting piezoelectric film characterization measurements.
Latt WT, Tan UX, Georgiou A
… +3 more, Sidarta AE, Riviere CN, Ang WT
Sens Actuators A Phys
· 2012 Jan · PMID 22423177
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An optical-based motion sensing system has been developed for real-time sensing of instrument motion in micromanipulation. The main components of the system consist of a pair of position sensitive detectors (PSD), lenses...An optical-based motion sensing system has been developed for real-time sensing of instrument motion in micromanipulation. The main components of the system consist of a pair of position sensitive detectors (PSD), lenses, an infrared (IR) diode that illuminates the workspace of the system, a non-reflective intraocular shaft, and a white reflective ball attached at the end of the shaft. The system calculates 3D displacement of the ball inside the workspace using the centroid position of the IR rays that are reflected from the ball and strike the PSDs. In order to eliminate inherent nonlinearity of the system, calibration using a feedforward neural network is proposed and presented. Handling of different ambient light and environment light conditions not to affect the system accuracy is described. Analyses of the whole optical system and effect of instrument orientation on the system accuracy are presented. Sensing resolution, dynamic accuracies at a few different frequencies, and static accuracies at a few different orientations of the instrument are reported. The system and the analyses are useful in assessing performance of hand-held microsurgical instruments and operator performance in micromanipulation tasks.
Sens Actuators A Phys
· 2011 Jun · PMID 22423176
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High sensing resolution is required in sensing of surgical instrument motion in micromanipulation tasks. Accelerometers can be employed to sense physiological motion of the instrument during micromanipulation. Various co...High sensing resolution is required in sensing of surgical instrument motion in micromanipulation tasks. Accelerometers can be employed to sense physiological motion of the instrument during micromanipulation. Various configurations of accelerometer placement had been introduced in the past to sense motion of a rigid-body such as a surgical instrument. Placement (location and orientation) of accelerometers fixed in the instrument plays a significant role in achieving high sensing resolution. However, there is no literature or work on the effect of placement of accelerometers on sensing resolution. In this paper, an approach of placement of accelerometers within an available space to obtain highest possible sensing resolution in sensing of rigid-body motion in micromanipulation tasks is proposed. Superiority of the proposed placement approach is shown in sensing of a microsurgical instrument angular motion by comparing sensing resolutions achieved as a result of employing the configuration following the proposed approach and the existing configurations. Apart from achieving high sensing resolution, and design simplicity, the proposed placement approach also provides flexibility in placing accelerometers; hence it is especially useful in applications with limited available space to mount accelerometers.
Lederer T, Stehrer BP, Bauer S
… +2 more, Jakoby B, Hilber W
Sens Actuators A Phys
· 2011 Dec · PMID 22241942
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We demonstrate the operation of a digital microfluidic lab-on-a-chip system utilizing Electro Wetting on Dielectrics (EWOD) as the actuation principle and a High Fundamental Frequency (HFF; 50 MHz) quartz crystal microba...We demonstrate the operation of a digital microfluidic lab-on-a-chip system utilizing Electro Wetting on Dielectrics (EWOD) as the actuation principle and a High Fundamental Frequency (HFF; 50 MHz) quartz crystal microbalance (QCM) resonator as a mass-sensitive sensor. In a first experiment we have tested the reversible formation of a phosphor-lipid monolayer of phospholipid vesicles out of an aqueous buffer suspension onto a bio-functionalized integrated QCM sensor. A binding of bio-molecules results in an altered mass load of the resonant sensor and a shift of the resonance frequency can be measured. In the second part of the experiment, the formation of a protein multilayer composed of the biomolecule streptavidin and biotinylated immunoglobulin G was monitored. Additionally, the macroscopic contact angle was optically measured in order to verify the bio-specific binding and to test the implications onto the balance of the surface tensions. Using these sample applications, we were able to demonstrate and to verify the feasibility of integrating a mass-sensitive QCM sensor into a digital microfluidic chip.
Sens Actuators A Phys
· 2011 Jun · PMID 22199458
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In this paper, we present the design and fabrication of a 1D beam steering device based on planar electro-optic thermal-plastic prisms and a collimator lens array. With the elimination of moving parts, the proposed devic...In this paper, we present the design and fabrication of a 1D beam steering device based on planar electro-optic thermal-plastic prisms and a collimator lens array. With the elimination of moving parts, the proposed device is able to overcome the mechanical limitations of present scanning devices, such as fatigue and low operating frequency, while maintaining a small system footprint (~0.5mm×0.5mm). From experimental data, our prototype device is able to achieve a maximum deflection angle of 5.6° for a single stage prism design and 29.2° for a cascaded three prisms stage design. The lens array shows a 4µm collimated beam diameter.